Description: Airco Temescal FC-1800 Evaporator System with Airco Temescal HV CNTL 14 (SN 175), Serial Number 210, To Include: Power Supply, Control Panel, CTI-Cryopump 8, Part Number 3543811G004, Serial Number. Field service and parts for Airco Temescal electron beam gun power supplies, electron beam guns, electron beam sweeps,deposition systems and helium leak detectors. Schematics and Drawings (Adobe PDF Format required to read prints). CV-8 Manual: CV-14 Power Supply Schematics. Power Supply Control Rack Sheet 2 of 2.

Shape 4 - Vent Device - Situated inside the entrance screen below and to the left of the Bell Jar Bottom 3. Switch the knob countertop clockwise (to your left) to open up; you should be able to sense suction at the opposing finish of the of the device opening 4. Verify the Cryogenics Temperatures Signal (CTI) located on the right side of the chambér, it should read through 12-14oD; if the temperature increases, verify the HI VAC valve to create certain it is definitely completely shut. Take note: If the HIVAC device is completely closed and the temperatures reads outside of the 12-14oD range; get in touch with support employees in the clean room immediately for assistance 5. Continue to turn the device until a minor whistling sound is noticed, this shows that the chamber stress is escalating. Once the stress starts to boost, stop turning the knob and wait around around 2-3 a few minutes †6. As soon as the pressure has arrived at atmosphere level, completely open the in-take valve (counterclockwise) as noticed in Figure 4 4.

Open the chamber (Number 5) by shifting the lever (pointed out by the arrow) forward, or away from you, to increase the Bell Container. Shape 6 - Inficon - movie thickness keep track of ‰ 7. Check out for the “XTAL” sign lighting, if the indication is blinking, the crystal clear is bad. Notice: If the crystal is bad, it will need to be changed; get in touch with support workers in the clear space for support. If the “XTAL” signal is not really blinking, the crystal is great and ready for use. Spot your wafer ón the substrate installation plate and secure it by fastening the steel videos as shown in Amount 7. Take note: You need to make use of the 5/16th in .

CV-6SLX TECHNICAL MANUAL Revision F, July 2008 Temescal, a part of Edwards Vacuum, Inc. 4569-C Las Positas Road, Livermore, CA 94551. Temescal, a part of Edwards.

socket wrench tó fasten the cIips. Shape 18 - Inficon - movie thickness keep track of † 1.

Push the “Program” button (pointed out by the reddish colored arrow) † 2. Following, push the “Thickness 2” switch and get into a worth for “Thickness 2” followed by the “Enter” switch (highlighted in blue) † 3. Press the “Thickness 1” button and enter a value (usually the exact same as “Thickness 2”) and push “Enter” † 4. Following, push the “Time” switch and get into a worth for “Time” (typicaIly ‘9999') and press “Enter” † 5.

Press the “Density” switch and get into a worth for “Density” (this depends on the steel you are usually depositing and should become obtained from the Mass densities and Z . Values table) ánd press “Enter” † 6. Press the “Z Ratio” button and enter a value for “Z Ratio” (again, this depends on the steel you are usually depositing, get from the Mass Densities and Z Values table) ánd press “Enter” † 7. Lastly, press the “Tooling” switch and enter a worth for “Tooling” (typically ‘100'), push “Enter” ‰ 24. Open up the water control device (situated behind Indy) by turning the control device to your remaining until the handle is certainly parallel with the drinking water series as proven in Number 19. Shape 22 - CV-8 AircoTemescal † 1.

Change the Key to the “On” placement; the “P.Chemical. Cards Keylock” and “HV OFF” lighting should arrive on (highlighted in glowing blue) Be aware: You can stop out on thé Inficon by pushing the “No” switch on the lnficon.

On the CV-8, change the “Emission Control” button (highlighted in natural), situated on the right aspect, to zero † 3. Press the “H.V. ON” button (highlighted in tangerine) and hold for 1 2nd † 4. Push the “Rifle #1 Fil.

On” button (highlighted in yellowish) † 5. Switch the “Emission Manage” knob (in green) to desired setting which will be dependent on the metallic you are usually lodging ‰ 28.

Look through the windows in the bell jar, a gentle purple glow in the crucibIe in the chambér signifies the metallic is heating up as noticed in Physique 23. Body 25 - Shutter Handle (Open) ‰ 1. The shutter is certainly controlled by a rubber tube situated below the bell jar. Change the tube Clockwise (to the best) to open the shutter as noticed in Body 25 and keep it open ‰ 32.

With the shutter open up and out of the method, allow the evaporating metallic to down payment onto the substraté to the preferred width. On the Inficon (Amount 24, web page 18), for many materials you should keep your deposition price at around 1-1.5 Angstroms/sec, you will get a even more even finish if you operate it gradually; to end up being secure keep it beIow 2 Angstroms/sec ‰ 34. Continue to hold the shutter open up until you reach you desired thickness. Once you are ready to quit depositing metal, execute the using actions: Figure 26 - CV-8 Airco Temescal ‰ 1. Push the “H.Sixth is v. Off” button on the Curriculum vitae-8 Airco Temescal (Physique 26, highlighted in glowing blue) and shut the “Shutter” (notice Number 25 - Shutter Control on web page 18) at the exact same period (to close the shutter, change the tubing counter-top counterclockwise or to your still left) o Turning off the Large Voltage halts the electron ray from heating the metallic and shutting the shutter psychologically prevents any further deposition. Press the “Gun #1 Fil.

Off” key on the Airco Temescal (Physique 26, pointed out in yellowish) ‰ 3. Return the Emission Control knob to No (Physique 26, underlined in natural) ‰ 4. Turn the essential on the Aircó Temescal to thé away place (this hinders the high voltage) ‰ 5.

Turn the “Emis” Ion Measure away from on the Varian (notice Amount 16 - Varian SenTorr on web page 15) ‰ 6. Eliminate energy from the Inficon as seen below in Physique 27 Shape 27 - Inficon ‰ 36.

Enable the system to amazing for 15-20 minutes. After the system provides cooled, switch the “Main Powér” off on thé “rolling” power source by flipping the lever down as proven in Physique 28. Number 28 - Primary Energy - Rolling Power Offer (Off) ‰ 39. Convert off water control device (situated behind Indy) by switching the control device to your perfect until the handle is perpendicular with the drinking water series (Body 29) Body 29 - Drinking water Control device (Off) ‰ 40. Change off energy at main outlet breaker Amount 30 - Signal Breaker (Off) ‰ 41. Close up the HiVac control device (clockwise), it is definitely essential to create sure it will be completely shut therefore apply approximately 50 lbs of force to the handle; you need it to become cuddle but not really too tight. Shape 31 - Hi-Vac Control device ‰ 42.

Get rid of the front panel again by pulling downward on the bands and raising up on the section (Number 32). Shape 32 - Front side Cell Latches (noted by arrows) ‰ 43. Open the “Vent out Valve” by switching the button counter clockwise (or to your still left) until you listen to a small “hissing” sound, then turn it two or three even more moments as noticed in Amount 33.

Wait for the chamber to vent, the hissing will end when it has arrived at Atmospheric pressure. Physique 33 - Vent Control device (Open) ‰ 44. Drive the handle ahead to open the bell container (Physique 34). When the bell jar has totally opened you can turn it to the remaining out of your method. Figure 34 - Opening the Bell Jar ‰ 45. Eliminate the metallic plate from the chamber by lifting it from the three steel prongs on which it is certainly mounted (as seen in Number 35), and arranged it on the desk to the left of the machine. Number 35 - Metal Plate ‰ 46.

Examine the cup slides that cover the home window of the bell container, if the slides are simply no longer transparent, they will need to become replaced. Close up the Bell Container by pulling the handle backwards (pointed out by the red arrow in Body 36) Number 36 - Bell Jar in the Closed Place ‰ 48. Next, shut the Vent out Control device by switching it clockwise (best), as noticed in Shape 37 Shape 37 - Vent Control device (Close) ‰ 49. Open the Roughing Control device by raising the crimson toggle protection and metallic handle up (Figure 38). Amount 38 - Pneumatic Roughing Device (Open up) ‰ 50. Tube the system down to 2E-2 torr (Figure 39 demonstrated in blue).

Amount 39 - Varian SenTorr ‰ 51. Close Roughing Device (Shape 40).

Shape 40 - Pneumatic Roughing Valve (Close) ‰ 52. Finish of process.

Explanation Airco TemescaI FC-1800 Evaporator Photos: Download OEM: Airco Temescal Design: Temescal FC-1800 Evaporator Description: Airco TemescaI FC-1800 Evaporator System with Airco TemescaI HV CNTL 14 (SN 175), Serial Number 210, To Include: Strength Supply, Control Cell, CTI-Cryopump 8, Part Amount 3543811G004, Serial Number Location:San Jose, CA, U.S i9000.A. Make sure you get in touch with us for the accessibility of the pursuing utilized semiconductor apparatus and parts.

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Physique 4 - Vent Control device - Located inside the front side screen below and to the still left of the Bell Jar Foundation 3. Change the knob counter-top clockwise (to your still left) to open; you should be capable to experience suction at the reverse finish of the of the control device starting 4. Examine the Cryogenics Temperatures Indication (CTI) situated on the correct part of the chambér, it should read 12-14oC; if the heat range increases, verify the HI VAC valve to make certain it will be completely closed. Take note: If the HIVAC device is totally closed and the temp states outside of the 12-14oD range; contact support employees in the clear room instantly for help 5. Continue to switch the valve until a slight whistling sound is heard, this indicates that the chamber pressure is increasing. Once the stress starts to enhance, stop turning the button and wait around approximately 2-3 a few minutes †6.

As soon as the pressure has attained atmosphere level, completely open up the vent out device (counterclockwise) as observed in Figure 4 4. Open the chamber (Amount 5) by shifting the handle (indicated by the arrow) forwards, or away from you, to increase the Bell Jar. Physique 6 - Inficon - movie thickness keep track of ‰ 7. Check out for the “XTAL” signal light, if the signal is flashing, the crystal is poor. Note: If the crystal is bad, it will require to end up being changed; get in touch with support employees in the clean space for support. If the “XTAL” sign is not really flashing, the crystal clear is great and prepared for use. Spot your wafer ón the substrate mounting platter and secure it by fastening the steel clips as shown in Shape 7.

Notice: You require to use the 5/16th inches socket wrench tó fasten the cIips. Shape 18 - Inficon - film thickness monitor † 1. Push the “Program” key (indicated by the crimson arrow) † 2. Following, press the “Thickness 2” button and enter a worth for “Thickness 2” implemented by the “Enter” button (highlighted in azure) † 3. Push the “Thickness 1” switch and get into a value (usually the same as “Thickness 2”) and press “Enter” † 4. Next, push the “Time” key and get into a worth for “Time” (typicaIly ‘9999') and press “Enter” † 5. Press the “Density” key and get into a worth for “Density” (this is dependent on the steel you are adding and should be attained from the Mass densities and Z Values table) ánd press “Enter” † 6.

Press the “Z Ratio” button and enter a value for “Z Ratio” (once again, this depends on the steel you are depositing, obtain from the Mass Densities and Z Values table) ánd press “Enter” † 7. Lastly, push the “Tooling” button and get into a value for “Tooling” (typically ‘100'), press “Enter” ‰ 24.

Open the water control device (situated behind Indy) by turning the device to your left until the deal with is parallel with the drinking water range as demonstrated in Number 19. Number 22 - CV-8 AircoTemescal † 1. Convert the Essential to the “On” place; the “P.G. Credit cards Keylock” and “HV OFF” lamps should come on (highlighted in azure) Take note: You can zero out on thé Inficon by pushing the “Zero” switch on the lnficon.

On the Resume-8, convert the “Emission Control” button (highlighted in natural), located on the right part, to zero † 3. Press the “H.V. About” button (highlighted in lemon) and keep for 1 second † 4. Press the “Gun #1 Fil. On” button (highlighted in yellowish) † 5. Convert the “Emission Control” knob (in green) to desired environment which will be reliant on the metallic you are usually depositing ‰ 28.

Look through the windowpane in the bell jar, a light purple shine in the crucibIe in the chambér indicates the metallic is heating up as noticed in Physique 23. Determine 25 - Shutter Handle (Open) ‰ 1. The shutter is usually managed by a rubber tube situated below the bell jar. Turn the tube Clockwise (to the ideal) to open up the shutter as seen in Shape 25 and keep it open ‰ 32. With the shutter open and out of the way, permit the evaporating metal to down payment onto the substraté to the desired thickness. On the Inficon (Physique 24, web page 18), for most metals you should keep your deposit rate at approximately 1-1.5 Angstroms/securities and exchange commission's, you will get a more even covering if you operate it gradually; to end up being safe keep it beIow 2 Angstroms/sec ‰ 34.

Continue to hold the shutter open up until you reach you preferred thickness. As soon as you are usually prepared to cease depositing steel, carry out the pursuing ways: Figure 26 - Resume-8 Airco Temescal ‰ 1. Press the “H.V. Off” switch on the CV-8 Airco Temescal (Physique 26, outlined in azure) and shut the “Shutter” (observe Figure 25 - Shutter Handle on web page 18) at the exact same time (to shut the shutter, turn the tubing table counterclockwise or to your still left) o Switching off the High Voltage prevents the electron ray from heating the steel and shutting the shutter physically stops any additional deposition. Push the “Gun #1 Fil. Off” switch on the Airco Temescal (Number 26, underlined in yellow) ‰ 3. Come back the Emission Handle knob to No (Number 26, underlined in green) ‰ 4.

Switch the key on the Aircó Temescal to thé away place (this disables the high voltage) ‰ 5. Turn the “Emis” Ion Measure off on the Varian (find Figure 16 - Varian SenTorr on page 15) ‰ 6. Get rid of energy from the Inficon as observed below in Body 27 Number 27 - Inficon ‰ 36. Allow the program to fascinating for 15-20 mins. After the program offers cooled, switch the “Main Powér” off on thé “rolling” power supply by flipping the lever lower as shown in Number 28. Physique 28 - Major Power - Running Power Offer (Off) ‰ 39.

Change off water control device (situated behind Indy) by turning the valve to your best until the deal with is verticle with respect with the water series (Body 29) Shape 29 - Water Device (Off) ‰ 40. Change off energy at main routine breaker Physique 30 - Circuit Breaker (Off) ‰ 41. Close up the HiVac control device (clockwise), it will be important to create sure it is completely closed therefore apply approximately 50 pounds of power to the lever; you wish it to be cuddle but not too limited. Number 31 - Hi-Vac Valve ‰ 42. Eliminate the top panel again by pulling downward on the rings and raising up on the cell (Shape 32). Figure 32 - Top Screen Latches (marked by arrows) ‰ 43. Open up the “Vent Valve” by switching the knob kitchen counter clockwise (or to your still left) until you hear a minor “hissing” sound, then turn it two or three even more instances as noticed in Physique 33.

Wait for the chamber to vent, the hissing will stop when it provides reached Atmospheric stress. Amount 33 - Vent Valve (Open) ‰ 44. Press the lever ahead to open up the bell jar (Amount 34). When the bell container has completely opened you can move it to the remaining out of your method.

Number 34 - Starting the Bell Container ‰ 45. Remove the steel plate from the chamber by lifting it from the three metal prongs on which it will be mounted (as observed in Shape 35), and established it on the table to the still left of the device. Body 35 - Steel Plate ‰ 46. Check the cup photo slides that include the windows of the bell container, if the photo slides are simply no longer transparent, they will require to end up being replaced. Close the Bell Container by pulling the lever backwards (indicated by the reddish arrow in Physique 36) Number 36 - Bell Container in the Closed Place ‰ 48.

Next, shut the In-take Valve by turning it clockwise (ideal), as seen in Body 37 Body 37 - Vent Control device (Close up) ‰ 49. Open the Roughing Valve by lifting the crimson toggle protection and steel handle up (Number 38). Body 38 - Pneumatic Roughing Device (Open) ‰ 50. Tube the system down to 2E-2 torr (Physique 39 shown in blue). Number 39 - Varian SenTorr ‰ 51. Close up Roughing Control device (Amount 40).

Number 40 - Pneumatic Roughing Control device (Close) ‰ 52. Finish of process.